Micromachined extrinsic Fabry-Pérot cavity for low-frequency acoustic wave sensing.
Fu X, Lu P, Zhang J, Qu Z, Zhang W, Li Y, Hu P, Yan W, Ni W, Liu D, Zhang J.
Fu X, et al. Among authors: zhang w, zhang j.
Opt Express. 2019 Aug 19;27(17):24300-24310. doi: 10.1364/OE.27.024300.
Opt Express. 2019.
PMID: 31510321
Free article.