Monolithic three-dimensional tier-by-tier integration via van der Waals lamination.
Lu D, Chen Y, Lu Z, Ma L, Tao Q, Li Z, Kong L, Liu L, Yang X, Ding S, Liu X, Li Y, Wu R, Wang Y, Hu Y, Duan X, Liao L, Liu Y.
Lu D, et al. Among authors: liao l.
Nature. 2024 May 22. doi: 10.1038/s41586-024-07406-z. Online ahead of print.
Nature. 2024.
PMID: 38778106