CMP Pad Conditioning Using the High-Pressure Micro-Jet Method.
Li X, Wang Y, Chen H, Zhao W, Deng Q, Yin T, To S, Sun Z, Shen X, Hang W, Yuan J.
Li X, et al. Among authors: hang w.
Micromachines (Basel). 2023 Jan 13;14(1):200. doi: 10.3390/mi14010200.
Micromachines (Basel). 2023.
PMID: 36677261
Free PMC article.