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High Rate Deposition of Piezoelectric AlScN Films by Reactive Magnetron Sputtering from AlSc Alloy Targets on Large Area.
Micromachines (Basel). 2022 Sep 21;13(10):1561. doi: 10.3390/mi13101561.
Micromachines (Basel). 2022.
PMID: 36295914
Free PMC article.
Thermal Analysis of Parylene Thin Films for Barrier Layer Applications.
Buchwalder S, Borzì A, Diaz Leon JJ, Bourgeois F, Nicolier C, Nicolay S, Neels A, Zywitzki O, Hogg A, Burger J.
Buchwalder S, et al. Among authors: zywitzki o.
Polymers (Basel). 2022 Sep 4;14(17):3677. doi: 10.3390/polym14173677.
Polymers (Basel). 2022.
PMID: 36080750
Free PMC article.
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