Reactive Vapor-Phase Inhibitors for Area-Selective Depositions at Tunable Critical Dimensions.
Ogunfowora LA, Singh I, Arellano N, Pattison TG, Magbitang T, Nguyen K, Ransom B, Lionti K, Nguyen S, Topura T, Delenia E, Sherwood M, Savoie BM, Wojtecki R.
Ogunfowora LA, et al. Among authors: savoie bm.
ACS Appl Mater Interfaces. 2024 Jan 31;16(4):5268-5277. doi: 10.1021/acsami.3c14821. Epub 2024 Jan 11.
ACS Appl Mater Interfaces. 2024.
PMID: 38206307