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Fabrication of High-κ Dielectric Metal Oxide Films on Topographically Patterned Substrates: Polymer Brush-Mediated Depositions.
ACS Appl Mater Interfaces. 2022 Jul 20;14(28):32729-32737. doi: 10.1021/acsami.2c07966. Epub 2022 Jul 7.
ACS Appl Mater Interfaces. 2022.
PMID: 35797515
Free PMC article.
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