Ultrashort vertical-channel MoS2 transistor using a self-aligned contact.
Liu L, Chen Y, Chen L, Xie B, Li G, Kong L, Tao Q, Li Z, Yang X, Lu Z, Ma L, Lu D, Yang X, Liu Y.
Liu L, et al. Among authors: li z, li g.
Nat Commun. 2024 Jan 2;15(1):165. doi: 10.1038/s41467-023-44519-x.
Nat Commun. 2024.
PMID: 38167517
Free PMC article.