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Multi-Foci Laser Separation of Sapphire Wafers with Partial Thickness Scanning.
Micromachines (Basel). 2022 Mar 24;13(4):506. doi: 10.3390/mi13040506.
Micromachines (Basel). 2022.
PMID: 35457810
Free PMC article.
Multi-Foci Division of Nonlinear Energy Absorption on Ultrashort Pulse Laser Singulation of Sapphire Wafers.
Lye CSM, Wang Z, Lam YC.
Lye CSM, et al.
Micromachines (Basel). 2021 Oct 28;12(11):1328. doi: 10.3390/mi12111328.
Micromachines (Basel). 2021.
PMID: 34832740
Free PMC article.
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