Low-thermal-budget synthesis of monolayer molybdenum disulfide for silicon back-end-of-line integration on a 200 mm platform.
Zhu J, Park JH, Vitale SA, Ge W, Jung GS, Wang J, Mohamed M, Zhang T, Ashok M, Xue M, Zheng X, Wang Z, Hansryd J, Chandrakasan AP, Kong J, Palacios T.
Zhu J, et al. Among authors: xue m.
Nat Nanotechnol. 2023 May;18(5):456-463. doi: 10.1038/s41565-023-01375-6. Epub 2023 Apr 27.
Nat Nanotechnol. 2023.
PMID: 37106051