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An innovative GC-MS, NMR and ESR combined, gas-phase investigation during chemical vapor deposition of silicon oxynitrides films from tris(dimethylsilyl)amine.
Phys Chem Chem Phys. 2021 May 5;23(17):10560-10572. doi: 10.1039/d1cp01129d.
Phys Chem Chem Phys. 2021.
PMID: 33903868
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