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An innovative GC-MS, NMR and ESR combined, gas-phase investigation during chemical vapor deposition of silicon oxynitrides films from tris(dimethylsilyl)amine.
Phys Chem Chem Phys. 2021 May 5;23(17):10560-10572. doi: 10.1039/d1cp01129d.
Phys Chem Chem Phys. 2021.
PMID: 33903868
Amorphous alumina coatings: processing, structure and remarkable barrier properties.
Samélor D, Lazar AM, Aufray M, Tendero C, Lacroix L, Béguin JD, Caussat B, Vergnes H, Alexis J, Poquillon D, Pébère N, Gleizes A, Vahlas C.
Samélor D, et al.
J Nanosci Nanotechnol. 2011 Sep;11(9):8387-91. doi: 10.1166/jnn.2011.5068.
J Nanosci Nanotechnol. 2011.
PMID: 22097590
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