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Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers.
Microsyst Nanoeng. 2022 Sep 16;8:103. doi: 10.1038/s41378-022-00423-w. eCollection 2022.
Microsyst Nanoeng. 2022.
PMID: 36124080
Free PMC article.
A CMOS-MEMS BEOL 2-axis Lorentz-Force Magnetometer with Device-Level Offset Cancellation.
Sánchez-Chiva JM, Valle J, Fernández D, Madrenas J.
Sánchez-Chiva JM, et al.
Sensors (Basel). 2020 Oct 19;20(20):5899. doi: 10.3390/s20205899.
Sensors (Basel). 2020.
PMID: 33086559
Free PMC article.
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