CMP Pad Conditioning Using the High-Pressure Micro-Jet Method.
Li X, Wang Y, Chen H, Zhao W, Deng Q, Yin T, To S, Sun Z, Shen X, Hang W, Yuan J.
Li X, et al.
Micromachines (Basel). 2023 Jan 13;14(1):200. doi: 10.3390/mi14010200.
Micromachines (Basel). 2023.
PMID: 36677261
Free PMC article.