SiGe-enhanced Si capacitive modulator integration in a 300 mm silicon photonics platform for low power consumption.
Douix M, Perez-Galacho D, Charlet I, Baudot C, Acosta-Alba P, Kerdilès S, Euvrard C, Grosse P, Planchot J, Blanc R, Beneyton R, Gourhant O, Crémer S, Souhaité A, Vulliet N, Vivien L, Marris-Morini D, Boeuf F.
Douix M, et al. Among authors: grosse p.
Opt Express. 2019 Jun 24;27(13):17701-17707. doi: 10.1364/OE.27.017701.
Opt Express. 2019.
PMID: 31252726
Free article.