Ion-beam assisted sputtering of titanium nitride thin films.
Draher T, Polakovic T, Li J, Li Y, Welp U, Jiang JS, Pearson J, Armstrong W, Meziani ZE, Chang C, Kwok WK, Xiao Z, Novosad V.
Draher T, et al. Among authors: li y, li j.
Sci Rep. 2023 Apr 18;13(1):6315. doi: 10.1038/s41598-023-31549-0.
Sci Rep. 2023.
PMID: 37072413
Free PMC article.