Soft-x-ray projection lithography experiments using Schwarzschild imaging optics.
Tichenor DA, Kubiak GD, Malinowski ME, Stulen RH, Haney SJ, Berger KW, Brown LA, Sweatt WC, Bjorkholm JE, Freeman RR, Himel MD, Macdowell AA, Tennant DM, Wood R, Bokor J, Jewell TE, Mansfield WM, Waskiewicz WK, White DL, Windt DL.
Tichenor DA, et al. Among authors: haney sj.
Appl Opt. 1993 Dec 1;32(34):7068-71. doi: 10.1364/AO.32.007068.
Appl Opt. 1993.
PMID: 20856569