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Measurements of Microstructural, Chemical, Optical, and Electrical Properties of Silicon-Oxygen-Nitrogen Films Prepared by Plasma-Enhanced Atomic Layer Deposition.
Nanomaterials (Basel). 2018 Dec 5;8(12):1008. doi: 10.3390/nano8121008.
Nanomaterials (Basel). 2018.
PMID: 30563091
Free PMC article.
Influence of Annealing on the Dielectric Properties of Zn-SiO2/Si Nanocomposites Obtained in "Hot" Implantation Conditions.
Kołtunowicz TN, Czarnacka K, Gałaszkiewicz P, Komarov FF, Makhavikou MA, Milchanin OV.
Kołtunowicz TN, et al. Among authors: komarov ff.
Nanomaterials (Basel). 2022 Oct 2;12(19):3449. doi: 10.3390/nano12193449.
Nanomaterials (Basel). 2022.
PMID: 36234577
Free PMC article.
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Effect of Rapid Thermal Annealing on Si-Based Dielectric Films Grown by ICP-CVD.
Parkhomenko I, Vlasukova L, Komarov F, Kovalchuk N, Demidovich S, Zhussupbekova A, Zhussupbekov K, Shvets IV, Milchanin O, Zhigulin D, Romanov I.
Parkhomenko I, et al.
ACS Omega. 2023 Aug 8;8(33):30768-30775. doi: 10.1021/acsomega.3c04997. eCollection 2023 Aug 22.
ACS Omega. 2023.
PMID: 37636914
Free PMC article.
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Nanostructured TiAlCuN and TiAlCuCN coatings for spacecraft: effects of reactive magnetron deposition regimes and compositions.
Komarov FF, Konstantinov SV, Chizhov IV, Zaikov VA, Zubar TI, Trukhanov AV.
Komarov FF, et al.
RSC Adv. 2023 Jun 21;13(27):18898-18907. doi: 10.1039/d3ra02301j. eCollection 2023 Jun 15.
RSC Adv. 2023.
PMID: 37350864
Free PMC article.
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Effect of thermal annealing in vacuum and in air on nanograin sizes in hard and superhard coatings Zr-Ti-Si-N.
Pogrebnjak AD, Shpak AP, Beresnev VM, Kolesnikov DA, Kunitskii YA, Sobol OV, Uglov VV, Komarov FF, Shypylenko AP, Makhmudov NA, Demyanenko AA, Baidak VS, Grudnitskii VV.
Pogrebnjak AD, et al. Among authors: komarov ff.
J Nanosci Nanotechnol. 2012 Dec;12(12):9213-9. doi: 10.1166/jnn.2012.6777.
J Nanosci Nanotechnol. 2012.
PMID: 23447980
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