Atomic force microscopy data of novel high-k hydrocarbon films synthesized on Si wafers for gate dielectric applications.
Kwon J, Kim DO, Lee S, Kim ET.
Kwon J, et al. Among authors: kim et, kim do.
Data Brief. 2020 Apr 30;30:105652. doi: 10.1016/j.dib.2020.105652. eCollection 2020 Jun.
Data Brief. 2020.
PMID: 32395596
Free PMC article.
This data article is related to the article entitled, "Novel high-k gate dielectric properties of ultrathin hydrocarbon films for next-generation metal-insulator-semiconductor devices" (Kim et al., 2020) [1]....
This data article is related to the article entitled, "Novel high-k gate dielectric properties of ultrathin hydrocarbon films for next-gener …