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SiN half-etch horizontal slot waveguides for integrated photonics: numerical modeling, fabrication, and characterization of passive components.
Opt Express. 2022 Jan 31;30(3):4202-4214. doi: 10.1364/OE.446758.
Opt Express. 2022.
PMID: 35209662
Free article.
Etching and Chemical Control of the Silicon Nitride Surface.
Brunet M, Aureau D, Chantraine P, Guillemot F, Etcheberry A, Gouget-Laemmel AC, Ozanam F.
Brunet M, et al. Among authors: chantraine p.
ACS Appl Mater Interfaces. 2017 Jan 25;9(3):3075-3084. doi: 10.1021/acsami.6b12880. Epub 2017 Jan 11.
ACS Appl Mater Interfaces. 2017.
PMID: 27977928
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