Analysis of the blurring in stencil lithography.
Vazquez-Mena O, Villanueva LG, Savu V, Sidler K, Langlet P, Brugger J.
Vazquez-Mena O, et al. Among authors: villanueva lg.
Nanotechnology. 2009 Oct 14;20(41):415303. doi: 10.1088/0957-4484/20/41/415303. Epub 2009 Sep 18.
Nanotechnology. 2009.
PMID: 19762941
Free article.