Physical and chemical properties of sputter-deposited TaC(x)N(y) films.
Aouadi SM, Zhang Y, Basnyat P, Stadler S, Filip P, Williams M, Hilfiker JN, Singh N, Woollam JA.
Aouadi SM, et al. Among authors: stadler s.
J Phys Condens Matter. 2006 Feb 15;18(6):1977-86. doi: 10.1088/0953-8984/18/6/013. Epub 2006 Jan 25.
J Phys Condens Matter. 2006.
PMID: 21697570