Accurate microfour-point probe sheet resistance measurements on small samples.
Thorsteinsson S, Wang F, Petersen DH, Hansen TM, Kjaer D, Lin R, Kim JY, Nielsen PF, Hansen O.
Thorsteinsson S, et al. Among authors: hansen tm, hansen o.
Rev Sci Instrum. 2009 May;80(5):053902. doi: 10.1063/1.3125050.
Rev Sci Instrum. 2009.
PMID: 19485515
Free article.