Piezoelectric micromachined ultrasonic transducers based on PZT thin films.
Muralt P, Ledermann N, Baborowski J, Barzegar A, Gentil S, Belgacem B, Petitgrand S, Bosseboeuf A, Setter N.
Muralt P, et al.
IEEE Trans Ultrason Ferroelectr Freq Control. 2005 Dec;52(12):2276-88. doi: 10.1109/tuffc.2005.1563270.
IEEE Trans Ultrason Ferroelectr Freq Control. 2005.
PMID: 16463493