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Powder Filling and Sintering of 3D In-chip Solenoid Coils with High Aspect Ratio Structure.
Micromachines (Basel). 2020 Mar 22;11(3):328. doi: 10.3390/mi11030328.
Micromachines (Basel). 2020.
PMID: 32235795
Free PMC article.
Broadband Lumped-Element Parameter Extraction Method of Two-Port 3D MEMS In-Chip Solenoid Inductors Based on a Physics-Based Equivalent Circuit Model.
Sun J, Li H, Wu S, Xu T, Li H, Wu H, Xia S.
Sun J, et al.
Micromachines (Basel). 2020 Sep 3;11(9):836. doi: 10.3390/mi11090836.
Micromachines (Basel). 2020.
PMID: 32899110
Free PMC article.
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