High-energy channeling implants of phosphorus along the silicon
Phys Rev B Condens Matter
.
1991 Nov 15;44(19):10568-10577.
doi: 10.1103/physrevb.44.10568.
Authors
V Raineri V
,
R Setola
,
F Priolo
,
E Rimini
,
G Galvagno
PMID:
9999082
DOI:
10.1103/physrevb.44.10568
No abstract available