Polyacrylonitrile as an Efficient Transfer Medium for Wafer-Scale Transfer of Graphene

Mingpeng Shang; Saiyu Bu; Zhaoning Hu; Yixuan Zhao; Junhao Liao; Chunyang Zheng; Wenlin Liu; Qi Lu; Fangfang Li; Haotian Wu; Zhuofeng Shi; Yaqi Zhu; Zhiying Xu; Bingbing Guo; Beiming Yu; Chunhu Li; Xiaodong Zhang; Qin Xie; Jianbo Yin; Kaicheng Jia; Hailin Peng; Li Lin; Zhongfan Liu

doi:10.1002/adma.202402000

Polyacrylonitrile as an Efficient Transfer Medium for Wafer-Scale Transfer of Graphene

Adv Mater. 2024 May 13:e2402000. doi: 10.1002/adma.202402000. Online ahead of print.

Authors

Mingpeng Shang^{1

2

3}, Saiyu Bu⁴, Zhaoning Hu^{3

4}, Yixuan Zhao^{2

3}, Junhao Liao^{1

2

3

5}, Chunyang Zheng^{1

2

3

6}, Wenlin Liu^{2

3}, Qi Lu^{3

7}, Fangfang Li^{1

3}, Haotian Wu⁴, Zhuofeng Shi^{4

8}, Yaqi Zhu^{4

8}, Zhiying Xu^{4

9}, Bingbing Guo³, Beiming Yu⁴, Chunhu Li⁹, Xiaodong Zhang⁸, Qin Xie^{1

2

3}, Jianbo Yin^{3

6}, Kaicheng Jia³, Hailin Peng^{1

2

3}, Li Lin^{1

3

4}, Zhongfan Liu^{2

3}

Affiliations

¹ Academy for Advanced Interdisciplinary Studies, Peking University, Beijing, 100871, P. R. China.
² Center for Nanochemistry, Beijing National Laboratory for Molecular Science, College of Chemistry and Molecular Engineering, Peking University, Beijing, 100871, P. R. China.
³ Technology Innovation Center of Graphene Metrology and Standardization for State Market Regulation, Beijing Graphene Institute, Beijing, 100095, P. R. China.
⁴ School of Materials Science and Engineering, Peking University, Beijing, 100871, P. R. China.
⁵ National Center for Nanoscience and Technology, Beijing, 100190, P. R. China.
⁶ School of Electronics, Peking University, Beijing, 100871, P. R. China.
⁷ State Key Laboratory of Heavy Oil Processing, College of Science, China University of Petroleum, Beijing, 102249, P. R. China.
⁸ College of Chemistry and Chemical Engineering, Qingdao University, Qingdao, 266000, P. R. China.
⁹ Laboratory of Marine Chemistry Theory and Technology, Ministry of Education, College of Chemistry and Chemical Engineering, Ocean University of China, Qingdao, 266100, P. R. China.

PMID: 38738693
DOI: 10.1002/adma.202402000

Abstract

The disparity between growth substrates and application-specific substrates can be mediated by reliable graphene transfer, the lack of which currently strongly hinders the graphene applications. Conventionally, the removal of soft polymers, that support the graphene during the transfer, would contaminate graphene surface, produce cracks, and leave unprotected graphene surface sensitive to airborne contaminations. In this work, it is found that polyacrylonitrile (PAN) can function as polymer medium for transferring wafer-size graphene, and encapsulating layer to deliver high-performance graphene devices. Therefore, PAN, that is compatible with device fabrication, does not need to be removed for subsequent applications. The crack-free transfer of 4 in. graphene onto SiO₂/Si wafers, and the wafer-scale fabrication of graphene-based field-effect transistor arrays with no observed clear doping, uniformly high carrier mobility (≈11 000 cm² V^-1 s^-1), and long-term stability at room temperature, are achieved. This work presents new concept for designing the transfer process of 2D materials, in which multifunctional polymer can be retained, and offers a reliable method for fabricating wafer-scale devices of 2D materials with outstanding performance.

Keywords: carrier mobility; chemical vapor deposition; encapsulation; graphene single‐crystalline wafer; graphene transfer.

Abstract

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