Gentler, nanoscale ion implantation
Nat Nanotechnol
.
2024 May 6.
doi: 10.1038/s41565-024-01659-5.
Online ahead of print.
Author
Ying Diao
1
Affiliation
1
Department of Chemical and Biomolecular Engineering, Molecular Science and Engineering Theme, Beckman Institute for Advanced Science and Technology, University of Illinois, Urbana Champaign, Urbana, IL, USA. yingdiao@illinois.edu.
PMID:
38710879
DOI:
10.1038/s41565-024-01659-5
No abstract available