Editorial for the Special Issue on State-of-the-Art CMOS and MEMS Devices

Zhiming Chen

doi:10.3390/mi15030327

Editorial for the Special Issue on State-of-the-Art CMOS and MEMS Devices

Micromachines (Basel). 2024 Feb 27;15(3):327. doi: 10.3390/mi15030327.

Author

Zhiming Chen¹

Affiliation

¹ School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China.

Abstract

Complementary Metal Oxide Semiconductor (CMOS) and Micro-Electro-Mechanical System (MEMS) devices play significant roles in emerging research fields such as artificial intelligence (AI) [...].

Publication types

Editorial

Grants and funding

This work was funded in part by the National Natural Science Foundation of China under Grant 92373105, 62074015, and 62101038.