Flexible temperature-pressure dual sensor based on 3D spiral thermoelectric Bi2Te3 films

Hailong Yu; Zhenqing Hu; Juan He; Yijun Ran; Yang Zhao; Zhi Yu; Kaiping Tai

doi:10.1038/s41467-024-46836-1

Flexible temperature-pressure dual sensor based on 3D spiral thermoelectric Bi₂Te₃ films

Nat Commun. 2024 Mar 21;15(1):2521. doi: 10.1038/s41467-024-46836-1.

Authors

Hailong Yu^{1

2}, Zhenqing Hu^{1

2}, Juan He^{1

2}, Yijun Ran^{1

2}, Yang Zhao², Zhi Yu^{3

4}, Kaiping Tai^{5

6

7}

Affiliations

¹ School of Materials Science and Engineering, University of Science and Technology of China, Shenyang, 110016, China.
² Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang, 110016, China.
³ School of Materials Science and Engineering, University of Science and Technology of China, Shenyang, 110016, China. zyu@imr.ac.cn.
⁴ Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang, 110016, China. zyu@imr.ac.cn.
⁵ School of Materials Science and Engineering, University of Science and Technology of China, Shenyang, 110016, China. kptai@imr.ac.cn.
⁶ Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang, 110016, China. kptai@imr.ac.cn.
⁷ Liaoning professional technology innovation center for integrated circuit thermal management, Shenyang, 110016, China. kptai@imr.ac.cn.

Abstract

Dual-parameter pressure-temperature sensors are widely employed in personal health monitoring and robots to detect external signals. Herein, we develop a flexible composite dual-parameter pressure-temperature sensor based on three-dimensional (3D) spiral thermoelectric Bi₂Te₃ films. The film has a (000l) texture and good flexibility, exhibiting a maximum Seebeck coefficient of -181 μV K^-1 and piezoresistance gauge factor of approximately -9.2. The device demonstrates a record-high temperature-sensing performance with a high sensing sensitivity (-426.4 μV K^-1) and rapid response time (~0.95 s), which are better than those observed in most previous studies. In addition, owing to the piezoresistive effect in the Bi₂Te₃ film, the 3D-spiral deviceexhibits significant pressure-response properties with a pressure-sensing sensitivity of 120 Pa^-1. This innovative approach achieves high-performance dual-parameter sensing using one kind of material with high flexibility, providing insight into the design and fabrication of many applications, such as e-skin.

Abstract

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