Inorganic perovskite-based active multifunctional integrated photonic devices

Qi Han; Jun Wang; Shuangshuang Tian; Shen Hu; Xuefeng Wu; Rongxu Bai; Haibin Zhao; David W Zhang; Qingqing Sun; Li Ji

doi:10.1038/s41467-024-45565-9

Inorganic perovskite-based active multifunctional integrated photonic devices

Nat Commun. 2024 Feb 20;15(1):1536. doi: 10.1038/s41467-024-45565-9.

Authors

Qi Han^#¹, Jun Wang^#², Shuangshuang Tian³, Shen Hu^{4

5}, Xuefeng Wu^{1

6}, Rongxu Bai¹, Haibin Zhao³, David W Zhang^{1

7

6

8}, Qingqing Sun^{9

10

11}, Li Ji^{12

13

14

15}

Affiliations

¹ State Key Laboratory of ASIC & System, School of Microelectronics, Fudan University, Shanghai, 200433, China.
² Department of Optical Science and Engineering, School of Information Science and Technology, Key Laboratory of Micro & Nano Photonic Structures, Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, and Shanghai Ultra-precision Optical Manufacturing Engineering Research Center, Fudan University, Shanghai, 200433, China. wangjunfd@fudan.edu.cn.
³ Department of Optical Science and Engineering, School of Information Science and Technology, Key Laboratory of Micro & Nano Photonic Structures, Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, and Shanghai Ultra-precision Optical Manufacturing Engineering Research Center, Fudan University, Shanghai, 200433, China.
⁴ State Key Laboratory of ASIC & System, School of Microelectronics, Fudan University, Shanghai, 200433, China. hushen@fudan.edu.cn.
⁵ Jiashan Fudan Institute, Jiaxing, 314110, China. hushen@fudan.edu.cn.
⁶ Zhangjiang Fudan International Innovation Center, Shanghai, 201210, China.
⁷ Jiashan Fudan Institute, Jiaxing, 314110, China.
⁸ Hubei Yangtze Memory Laboratories, Wuhan, 430205, China.
⁹ State Key Laboratory of ASIC & System, School of Microelectronics, Fudan University, Shanghai, 200433, China. qqsun@fudan.edu.cn.
¹⁰ Jiashan Fudan Institute, Jiaxing, 314110, China. qqsun@fudan.edu.cn.
¹¹ Zhangjiang Fudan International Innovation Center, Shanghai, 201210, China. qqsun@fudan.edu.cn.
¹² State Key Laboratory of ASIC & System, School of Microelectronics, Fudan University, Shanghai, 200433, China. lji@fudan.edu.cn.
¹³ Jiashan Fudan Institute, Jiaxing, 314110, China. lji@fudan.edu.cn.
¹⁴ Zhangjiang Fudan International Innovation Center, Shanghai, 201210, China. lji@fudan.edu.cn.
¹⁵ Hubei Yangtze Memory Laboratories, Wuhan, 430205, China. lji@fudan.edu.cn.

^# Contributed equally.

Abstract

The development of highly efficient active integrated photonic circuits is crucial for advancing information and computing science. Lead halide perovskite semiconductors, with their exceptional optoelectronic properties, offer a promising platform for such devices. In this study, active micro multifunctional photonic devices were fabricated on monocrystalline CsPbBr₃ perovskite thin films using a top-down etching technique with focused ion beams. The etched microwire exhibited a high-quality micro laser that could serve as a light source for integrated devices, facilitating angle-dependent effective propagation between coupled perovskite-microwire waveguides. Employing this strategy, multiple perovskite-based active integrated photonic devices were realized for the first time. These devices included a micro beam splitter that coherently separated lasing signals, an X-coupler performing transfer matrix functions with two distinguishable light sources, and a Mach-Zehnder interferometer manipulating the splitting and coalescence of coherent light beams. These results provide a proof-of-concept for active integrated functionalized photonic devices based on perovskite semiconductors, representing a promising avenue for practical applications in integrated optical chips.