Unsupervised machine learning techniques have been combined with scanning transmission electron microscopy (STEM) to enable comprehensive crystal structure analysis with nanometer spatial resolution. In this study, we investigated large-scale data obtained by four-dimensional (4D) STEM using dimensionality reduction techniques such as non-negative matrix factorization (NMF) and hierarchical clustering with various optimization methods. We developed software scripts incorporating knowledge of electron diffraction and STEM imaging for data preprocessing, NMF, and hierarchical clustering. Hierarchical clustering was performed using cross-correlation instead of conventional Euclidean distances, resulting in rotation-corrected diffractions and shift-corrected maps of major components. An experimental analysis was conducted on a high-pressure-annealed metallic glass, Zr-Cu-Al, revealing an amorphous matrix and crystalline precipitates with an average diameter of approximately 7 nm, which were challenging to detect using conventional STEM techniques. Combining 4D-STEM and optimized unsupervised machine learning enables comprehensive bimodal (i.e., spatial and reciprocal) analyses of material nanostructures.
© 2024. The Author(s).