High-performance flexible piezoresistive sensors are becoming increasingly essential in various novel applications such as health monitoring, soft robotics, and human-computer interaction. The evolution of the interfacial contact morphology determines the sensing properties of piezoresistive devices. The introduction of microstructures enriches the interfacial contact morphology and effectively boosts the sensitivity; however, the limited compressibility of conventional microstructures leads to rapid saturation of the sensitivity in the low-pressure range, which hinders their application. Herein, we present a flexible piezoresistive sensor featuring a two-stage micropyramid array structure, which effectively enhances the sensitivity while widening the sensing range. Owing to the synergistic enhancement effect resulting from the sequential contact of micropyramids of various heights, the devices demonstrate remarkable performance, including boosting sensitivity (30.8 kPa-1) over a wide sensing range (up to 200 kPa), a fast response/recovery time (75/50 ms), and an ultralong durability of 15,000 loading-unloading cycles. As a proof of concept, the sensor is applied to detect human physiological and motion signals, further demonstrating a real-time spatial pressure distribution sensing system and a game control system, showing great potential for applications in health monitoring and human-computer interaction.
Keywords: flexible piezoresistive sensor; health monitoring; human-computer interaction; micropyramids; multilevel microstructure.