In this paper, we report an all-dielectric metamaterial terahertz biosensor, which exhibits a high Q factor of 35 at an 0.82 resonance peak. A structure with an electromagnetically induced transparency effect was designed and fabricated to perform a Mie resonance for the terahertz response. The biosensor exhibits a limit of detection of 100 pg/mL for cytokine interleukin 2 (IL-2) and a linear response for the logarithm of the concentration of IL-2 in the range of 100 pg/mL to 1 μg/mL. This study implicates an important potential for the detection of cytokines in serum and has potential application in the clinical detection of cytokine release syndrome.
Keywords: all-dielectric metamaterial; cytokine; terahertz biosensor.