Based on three-dimensional optical proximity correction (3D OPC), recent advancements in 3D lithography have enabled the high-fidelity customization of 3D micro-optical elements. However, the micron-to-millimeter-scale structures represented by the Fresnel lens design bring more stringent requirements for 3D OPC, which poses significant challenges to the accuracy of models and the efficiency of algorithms. Thus, a lithographic model based on optical imaging and photochemical reaction curves is developed in this paper, and a subdomain division method with a statistics principle is proposed to improve the efficiency and accuracy of 3D OPC. Both the simulation and the experimental results show the superiority of the proposed 3D OPC method in the fabrication of Fresnel lenses. The computation memory requirements of the 3D OPC are reduced to below 1%, and the profile error of the fabricated Fresnel lens is reduced 79.98%. Applying the Fresnel lenses to an imaging system, the average peak signal to noise ratio (PSNR) of the image is increased by 18.92%, and the average contrast of the image is enhanced by 36%. We believe that the proposed 3D OPC method can be extended to the fabrication of vision-correcting ophthalmological lenses.
Keywords: 3D OPC; 3D lithography; Fresnel lens; PSNR.