Editorial for the Special Issue on Micro-Electromechanical System Inertial Devices

Micromachines (Basel). 2023 Nov 21;14(12):2134. doi: 10.3390/mi14122134.

Author

Affiliation

¹ State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.

Abstract

Micro-electromechanical systems (MEMS) are miniature systems comprising micro-mechanical sensors, actuators, and microelectronic circuits [...].

Publication types

Editorial