Rapid observation of dispersion curves in system-on-chip devices

Zimiao Wei; Yikai Chen; Junfeng Li; Zekai Wang; Xueqin Wu; Jiale Zheng; Xilong Liu; Wenke Lan; Yang Song; Zhonghua Shen; Qiang Fu

doi:10.1063/5.0142637

Rapid observation of dispersion curves in system-on-chip devices

Rev Sci Instrum. 2023 Apr 1;94(4):043101. doi: 10.1063/5.0142637.

Authors

Zimiao Wei¹, Yikai Chen¹, Junfeng Li¹, Zekai Wang¹, Xueqin Wu¹, Jiale Zheng¹, Xilong Liu¹, Wenke Lan¹, Yang Song¹, Zhonghua Shen¹, Qiang Fu²

Affiliations

¹ School of Sciences, Nanjing University of Science and Technology, Nanjing 210094, China.
² Department of Optoelectronic Information Science and Engineering, School of Physics and Materials Engineering, Hefei Normal University, Hefei 230601, China.

PMID: 38081248
DOI: 10.1063/5.0142637

Abstract

We have developed a rapid detection instrument to characterize the behavior of light on the surface of devices during light-matter interactions. The equipment enables the non-destructive and real-time observations of the dispersion curves for microstructures, providing the basis for a large number of new planar photonic chip applications. The method is based on the traditional prismatic reflection and makes full use of the grating dispersion capabilities, enabling simultaneous multi-wavelength and multi-angle reflectance measurements over a wide range. This method is beneficial for designing new microstructure devices and brings convenience to delicate microstructure processing. The instruments do not require any mechanical scanning, allowing for rapid acquisition, and the integrated and reusable optics make them easily miniaturized. Additionally, the functionalized design allows for spectral analysis applications, such as far-field spectral measurements. The instrument can also be easily integrated into established microscopic imaging systems, extending their observational characterization capabilities as well as accomplishing dynamic monitoring in proven system-on-a-chip devices.