Flexible liquid metal-based microfluidic strain sensors with fractal-designed microchannels for monitoring human motion and physiological signals

Abstract

With the rapid advancement of wearable electronics, there is an increasing demand for high-performance flexible strain sensors. In this work, a flexible strain sensor based on liquid metal (LM)-integrated into a microfluidic device is developed with Peano-type fractal structure design. Compared with the microfluidic sensors with straight and wavy microchannels, the sensor with Peano-shaped channels shows lower hysteresis and improved stretchability. Furthermore, the increase of the fractal order can further improve the sensing performances. The third-order Peano sensor exhibits excellent mechanical and electrical properties, including high tensile capability (490.3%), minimal hysteresis (DH = 0.86%), ultra-low detection limit (0.1%), low overshoot, rapid response time (117 ms), as well as good stability and durability. By adding two independent and perpendicular straight channels to the Peano sensing unit, the feasibility of multi-directional strain recognition is demonstrated. To further improve the sensitivity of the Peano-shaped sensor, a multi-layer Peano sensor is developed, exhibiting remarkably enhanced sensitivity while maintaining low hysteresis. Overall, the developed LM-based microfluidic strain sensors enrolling Peano fractal geometry hold high potential for various wearable electronics applications.

Keywords: Flexible sensor; Fractal; Liquid metal; Microfluidic; Peano curve.