One-step rolling fabrication of VO2 tubular bolometers with polarization-sensitive and omnidirectional detection

Binmin Wu; Ziyu Zhang; Bingxin Chen; Zhi Zheng; Chunyu You; Chang Liu; Xing Li; Jinlong Wang; Yunqi Wang; Enming Song; Jizhai Cui; Zhenghua An; Gaoshan Huang; Yongfeng Mei

doi:10.1126/sciadv.adi7805

One-step rolling fabrication of VO₂ tubular bolometers with polarization-sensitive and omnidirectional detection

Sci Adv. 2023 Oct 20;9(42):eadi7805. doi: 10.1126/sciadv.adi7805. Epub 2023 Oct 18.

Authors

Binmin Wu^{1

2

3}, Ziyu Zhang^{1

2

3}, Bingxin Chen⁴, Zhi Zheng^{1

2

3}, Chunyu You^{1

2

3}, Chang Liu^{1

2

3}, Xing Li^{1

2

3}, Jinlong Wang^{1

2

3}, Yunqi Wang^{1

2

3}, Enming Song^{3

5}, Jizhai Cui^{1

2

3}, Zhenghua An⁴, Gaoshan Huang^{1

2

3}, Yongfeng Mei^{1

2

3

5}

Affiliations

¹ Department of Materials Science & State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200438, People's Republic of China.
² Yiwu Research Institute of Fudan University, Yiwu, Zhejiang 322000, People's Republic of China.
³ International Institute of Intelligent Nanorobots and Nanosystems, Fudan University, Shanghai 200438, People's Republic of China.
⁴ State Key Laboratory of Surface Physics and Institute for Nanoelectronic Devices and Quantum Computing, Department of Physics, Fudan University, Shanghai 200438, People's Republic of China.
⁵ Shanghai Frontiers Science Research Base of Intelligent Optoelectronics and Perception, Institute of Optoelectronics, Fudan University, Shanghai 200438, People's Republic of China.

Abstract

Uncooled infrared detection based on vanadium dioxide (VO₂) radiometer is highly demanded in temperature monitoring and security protection. The key to its breakthrough is to fabricate bolometer arrays with great absorbance and excellent thermal insulation using a straightforward procedure. Here, we show a tubular bolometer by one-step rolling VO₂ nanomembranes with enhanced infrared detection. The tubular geometry enhances the thermal insulation, light absorption, and temperature sensitivity of freestanding VO₂ nanomembranes. This tubular VO₂ bolometer exhibits a detectivity of ~2 × 10⁸ cm Hz^1/2 W^-1 in the ultrabroad infrared spectrum, a response time of ~2.0 ms, and a calculated noise-equivalent temperature difference of 64.5 mK. Furthermore, our device presents a workable structural paradigm for polarization-sensitive and omnidirectional light coupling bolometers. The demonstrated overall characteristics suggest that tubular bolometers have the potential to narrow performance and cost gap between photon detectors and thermal detectors with low cost and broad applications.