In situ spin coater for multimodal grazing incidence x-ray scattering studies

Aidan H Coffey; Jonathan Slack; Earl Cornell; Lee L Yang; Kevan Anderson; Kang Wang; Letian Dou; Chenhui Zhu

doi:10.1063/5.0159297

In situ spin coater for multimodal grazing incidence x-ray scattering studies

Rev Sci Instrum. 2023 Sep 1;94(9):093906. doi: 10.1063/5.0159297.

Authors

Aidan H Coffey^{1

2}, Jonathan Slack¹, Earl Cornell¹, Lee L Yang¹, Kevan Anderson¹, Kang Wang², Letian Dou², Chenhui Zhu¹

Affiliations

¹ Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.
² Davidson School of Chemical Engineering, Purdue University, West Lafayette, Indiana 47907, USA.

PMID: 37756552
DOI: 10.1063/5.0159297

Abstract

We present herein a custom-made, in situ, multimodal spin coater system with an integrated heating stage that can be programmed with spinning and heating recipes and that is coupled with synchrotron-based, grazing-incidence wide- and small-angle x-ray scattering. The spin coating system features an adaptable experimental chamber, with the ability to house multiple ancillary probes such as photoluminescence and visible optical cameras, to allow for true multimodal characterization and correlated data analysis. This system enables monitoring of structural evolutions such as perovskite crystallization and polymer self-assembly across a broad length scale (2 Å-150 nm) with millisecond temporal resolution throughout a complete thin film fabrication process. The use of this spin coating system allows scientists to gain a deeper understanding of temporal processes of a material system, to develop ideal conditions for thin film manufacturing.