Starting from the respective metal M, we have synthesized the hexafluorides MF6 of M = Ru, Rh, and Pt by the use of a laser-based heating system and a remote fluorine plasma source using a mixture of Ar and NF3 as the feed gas. The formation of the hexafluorides was confirmed by several different spectroscopic methods, including IR, Raman, UV/vis, and NMR spectroscopy. In addition, we present first experimental hints that RuF6 is more reactive than PtF6, because RuF6 is able to oxidize lower fluorides of platinum to PtF6.