Soft pressure sensors based on 3D microstructures exhibit high sensitivity in the low-pressure range, which is crucial for various wearable and soft touch applications. However, it is still a challenge to manufacture soft pressure sensors with sufficient sensitivity under small mechanical stimuli for wearable applications. This work presents a novel strategy for extremely sensitive pressure sensors based on the composite film with local changes in curved 3D carbon nanotube (CNT) structure via expandable microspheres. The sensitivity is significantly enhanced by the synergetic effects of heterogeneous contact of the microdome structure and changes of percolation network within the curved 3D CNT structure. The finite-element method simulation is used to comprehend the relationships between the sensitivity and mechanical/electrical behavior of microdome structure under the applied pressure. The sensor shows an excellent sensitivity (571.64 kPa-1 ) with fast response time (85 ms), great repeatability, and long-term stability. Using the developed sensor, a wireless wearable health monitoring system to avoid carpel tunnel syndrome is built, and a multi-array pressure sensor for realizing a variety of movements in real-time is demonstrated.
Keywords: carbon nanotube percolation; high sensitivity; microdome structures; soft pressure sensors; thermally expandable microspheres.
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