Disentangling Tilt and Polarization Measurements in 4D-STEM Measurements of a Multilayer by Inversion of a Stacked Bloch Wave Model

Affiliations

• ¹ Department of Materials Science and Engineering, University of California, Berkeley, United States.
• ² Materials Science Division, Lawrence Berkeley National Laboratory, Berkeley, CA, United States.
• ³ Ian Holmes Imaging Centre, Bio21 Molecular Science and Biotechnology Institute, University of Melbourne, Victoria, Australia.
• ⁴ School for Engineering of Matter, Transport, and Energy, Arizona State University, Tempe, AZ, United States.
• ⁵ National Center for Electron Microscopy, Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA, United States.