Design and Fabrication of Annular-Array Ultrasound Transducer Based (K, Na) NbO3 Lead-Free 1-3 Piezoelectric Composite

IEEE Trans Ultrason Ferroelectr Freq Control. 2024 Jan;71(1):38-45. doi: 10.1109/TUFFC.2023.3303396. Epub 2024 Jan 9.

Abstract

This article reports the design, fabrication, and performance of an annular-array ultrasound transducer using (K, Na)NbO3 (KNN)-based lead-free 1-3 piezoelectric composite. The 1-3 piezoelectric composite based on lead-free 0.965(K0.45Na0.55)(Nb0.96Sb0.04)O3-0.035 Bi0.5Na0.5Zr0.85Hf0.15O3 (KNNS-BNZH) was first prepared with the dice-and-fill method. Different from previous reported studies, by patterning annular electrodes on this kind of 1-3 composite, a five-element annular-array transducer in diameter of 6 mm was designed and successfully fabricated and its working center frequency was increased from 5 MHz to around 15 MHz. Meanwhile, a -6 dB bandwidth of 50% was achieved for each annular-array element via a pulse-echo response measurement. Moreover, the obtained annular-array transducer exhibits low crosstalk (<-40 dB) and a high electromechanical coupling coefficient of around 0.7. The application of ultrasonic imaging was further demonstrated to show its excellent performance. Both theoretical analysis and experimental results show that the obtained annular-array transducer presented in this work has a competitive capability for ultrasonic application.