The electric field driven acceleration of plasma ions is an intrinsic effect in laser-induced plasma plumes and is responsible for the generation of high-energy ions. At high laser fluences (≥ 2 J/cm2), multiply charged ions are formed and affect the plume expansion dynamics. In this paper, we used kinetic energy-resolved mass spectrometry to investigate the relative abundance and kinetic energy distributions of singly- and doubly-charged ions produced by KrF-laser ablation of nine different oxide targets. The doubly charged metal ions with a lower mass-to-charge (m/z) ratio show narrow energy distributions at high average kinetic energies coinciding with the cutoff energies for the singly-charged ion distributions. The observation suggests that the recombination of higher charged ions plays a prominent role in the formation of the high-energy tail for singly-charged ions. The results are discussed in terms of component volatility and a dynamic double layer, where ions with different m/z values experience different accelerations.
Keywords: Kinetic energy distribution; Plasma spectroscopy; Pulsed laser deposition; Thin films.
© The Author(s) 2023.