A low-driving energy and bistable recoverable MEMS safety and arming device (S&A), based on microcasting technology and deep silicon etching technology, is proposed to meet safety system requirements. A force-electromagnetic combination solution is constructed for the Si MEMS S&A, with parameters and strength verified, ultimately achieving an S&A size of (13 × 13 × 0.4) mm. Additionally, a low-driving energy U-shaped electromagnetic coil (USEC) model is designed using microcasting technology, and an electrical-magnetic-mechanical coupling mathematical model is established to explore the relationship between design parameters and driving capacity and reliability. With a driving power of 8 V/0.5 A, the model achieves a stable electromagnetic driving force of 15 mN with a travel distance of 0.5 mm. Finally, the fabrication and testing of the USEC and S&A are carried out, with driving capability and S&A disarming ability tests conducted to verify the feasibility of the system design. Compared to the existing S&A, this scheme has the advantages of low-driving energy, recoverability, fast response speed, and strong adaptability.
Keywords: MEMS; S&A; U-shaped electromagnetic coil; bistable; microcast; recoverable.