Confocal micro X-ray fluorescence (CMXRF) spectroscopy is a non-destructive, depth-resolved, and element-specific technique that is used to analyze the elemental composition of a sample. For this, a focused beam of mono- or polychromatic X-rays is applied to excite the atoms in the sample, causing them to emit fluorescence radiation which is detected with focusing capillary optics. The confocal design of the instrument allows for depth-resolved analysis, in most cases with a resolution in the lower micrometer dimension after collecting X-rays from a predefined volume within the sample. The element-specific nature of the technique allows information to be obtained about the presence and concentration of specific elements in this volume. This makes CMXRF spectroscopy a valuable tool for a wide range of applications, especially when samples with an inhomogeneous distribution of elements and a relatively light matrix have to be analyzed, which are typical examples in materials science, geology, and biology. The technique is also commonly used in the art and archaeology fields to analyze the elemental composition of historical artifacts and works of art, helping to provide valuable insights into their provenance, composition, and making. Recent technical developments to increase sensitivity and efforts to improve quantification in three-dimensional samples will encourage wider use of this method across a multitude of fields of application in the near future. Confocal micro X-ray fluorescence (CMXRF) is based on the confocal overlap of two polycapillary lens foci, creating a depth-sensitive and non-destructive probing volume. Three-dimensional resolved element distribution images can be obtained by measuring the fluorescence intensity as function of the three-dimensional position.
Keywords: Confocal; Confocal micro X-ray fluorescence analysis; Depth profile; Non-destructive; Three-dimensional; XRF.
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