An All-Printed, Fast-Response Flexible Humidity Sensor Based on Hexagonal-WO3 Nanowires for Multifunctional Applications

Adv Mater. 2023 Oct;35(41):e2304420. doi: 10.1002/adma.202304420. Epub 2023 Sep 6.

Abstract

The utilization of printing techniques for the development of high-performance humidity sensors holds immense significance for various applications in the fields of the Internet of Things, agriculture, human healthcare, and storage environments. However, the long response time and low sensitivity of current printed humidity sensors limit their practical applications. Herein, a series of high-sensing-performance flexible resistive-type humidity sensors is fabricated by the screen-printing method, and hexagonal tungsten oxide (h-WO3 ) is employed as the humidity-sensing material due to its low cost, strong chemical adsorption ability, and excellent humidity-sensing ability. The as-prepared printed sensors exhibit high sensitivity, good repeatability, outstanding flexibility, low hysteresis, and fast response (1.5 s) in a wide relative humidity (RH) range (11-95% RH). Furthermore, the sensitivity of humidity sensors can be easily adjusted by altering the manufacturing parameters of the sensing layer and interdigital electrode to meet the diverse requirements of specific applications. The printed flexible humidity sensors possess immense potential in various applications, including wearable devices, non-contact measurements, and packaging opening state monitoring.

Keywords: flexible humidity sensors; hexagonal tungsten oxide; respiration rate monitoring; screen printing; semiconductor metal oxides.