Humidity plays an important role in many fields, and the realization of high sensitivity and fast response simultaneously for humidity detection is a great challenge in practical application. In this work, we demonstrated a high-performance relative humidity (RH) sensor made by supporting zeolitic imidazolate framework-90 (ZIF-90)-derived porous zinc oxide (ZnO) onto an optical microfiber Sagnac interferometer (OMSI). The ZIF-90-modified OMSI (ZIF-90-OMSI) sensor was in situ heated at different temperatures to obtain porous ZnO, and their humidity-sensing properties were investigated ranging from 25 to 80% RH. The experimental results showed that the porous ZnO fiber sensor prepared at 500 °C (Z500-OMSI) exhibited best humidity-sensing performance with a high sensitivity of 96.2 pm/% RH (25-45% RH) and 521 pm/% RH (50-80% RH) and ultrafast response/recovery time (62.37/206.67 ms) at 22.3% RH. These performances were attributed to the complete transformation of ZIF-90 to ZnO at 500 °C. The obtained Z500 not only retained the high porosity and specific surface area of ZIF-90 but also exhibited the exceptional hydrophilicity of ZnO. In addition, the signals of the proposed Z500-OMSI sensor changed with different breathing patterns, indicating the possibility for human respiration monitoring. This work provided a reliable candidate for an effective RH monitoring system with potential application in medical diagnoses, industrial production, environmental detection, and human health monitoring.
Keywords: ZIF-90; breath monitoring; humidity sensor; optical microfiber Sagnac interferometer; porous ZnO.