We demonstrate the femtosecond-laser processing of self-suspended monolayer graphene grown by chemical vapor deposition, resulting in multipoint drilling with holes having a diameter of <100 nm. Scanning transmission electron microscopy revealed the formation of many nanopores on the laser-irradiated graphene. Furthermore, atomic-level defects as well as nanopores were found in the graphene membrane by high-resolution transmission electron microscopy, while the overall crystal structure remained intact. Raman spectroscopy showed an increase in the defect density with an increase in the number of laser shots, suggesting that the nanopore formation triggered the creation of the <100 nm holes. The approach presented herein can offer an experimental insight into the simulation of atomic dynamics in graphene under femtosecond-laser irradiation. The thorough examination of the atomic defect formation and secondary effect of surface cleaning observed in this study would help develop engineering methods for graphene and other two-dimensional materials in the future.
Keywords: defect formation; femtosecond-laser irradiation; laser processing; monolayer graphene; nanopore; surface cleaning.