Low-temperature MoS
2
growth on CMOS wafers
Nat Nanotechnol
.
2023 May;18(5):446-447.
doi: 10.1038/s41565-023-01390-7.
Authors
Max C Lemme
1
,
Alwin Daus
2
Affiliations
1
Chair of Electronic Devices, RWTH Aachen University, Aachen, Germany. max.lemme@eld.rwth-aachen.de.
2
AMO GmbH, Aachen, Germany.
PMID:
37106054
DOI:
10.1038/s41565-023-01390-7
No abstract available